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Aluminum-Based Push-Pull Electrostatic MEMS Transducer for Earphones

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With the evolving market of true wireless stereo earphones and improvements in Bluetooth technology, wireless earphones have become a platform for innovation. Performance of such earphones ismeasured based on two main criteria: sound quality,which includes total harmonic distortion, and power consumption. Power consumption efficiency pertaining to such devices is critical in sustaining a good battery life. In this study, the design and fabrication of a novel aluminum-based push-pull electrostatic microelectromechanical systems transducer for earphones are presented. This device is designed to consume two orders of magnitude lower than a common earphone voice coil speaker and has a substantially higher quality of sound. Particularly, the authors elaborate on the underlying theoretical aspects pertaining to the design and on the unique fabrication challenges originating from the microscale nature.

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JAES Volume 70 Issue 10 pp. 894-908; October 2022
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AES - Audio Engineering Society