Characteristics of integrated microphones are easily set by a correct model. The behavior of flow in the gap or through the backplate is studied by the Navier-Stokes, the continuity, and state equations. Linearizing these equations leads to a system that controls the flow into microscopic acoustical structures. Analytical solutions for simple geometries appearing in the realization of an integrated microphone on silicon are given.

Author: Maisano, Joseph
Affiliation: Laboratoire d'Electromagnetisme et d'Acoustique, Lausanne, Switzerland
AES Convention: 94 (March 1993) Paper Number: 3529
Publication Date: March 1, 1993
Subject: Transducers

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